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	1.	PRINCIPLES OF MICROELECTROMECHANICAL SYSTEMS / Ki Bang Lee by Lee, Ki Bang [author] Material type: Text; Format: print ; Literary form: Not fiction Publisher: Hoboken, N.J. : WILEY, c2011Copyright date: ©2011 Availability: Items available for loan: UMK Kampus Jeli (1)Call number: TK7875 .L44 2011. Place hold
	2.	Fundamentals of micromechanics of solids / Jianmin Qu, Mohammed Cherkaoui. by Qu, Jianmin Cherkaoui, Mohammed Material type: Text; Format: print Publication details: Hoboken, N.J. : Wiley, c2006 Availability: Items available for loan: UMK Kampus Jeli (1)Call number: TA418.9.N35 Q22 2006 OS. Place hold
	3.	Mechanical design of microresonators : modeling and applications / Nicolae Lobontiu. by Lobontiu, Nicolae Series: McGraw-Hill nanoscience and technology series Material type: Text; Format: print Publication details: New York : McGraw-Hill, c2006 Availability: Items available for reference: UMK Kampus Bachok: Not for loan (1)Call number: TK7875 .L63 2006 REF.
	4.	MEMS/MOEMS packaging : concepts, designs, metarials, and processes / Ken Gilleo. by Gilleo, Ken Series: McGraw-Hill nanoscience and technology series Material type: Text; Format: print Publication details: New York : McGraw-Hill, c2005 Availability: Items available for loan: UMK Kampus Bachok (1)Call number: TK7870.15 .G55 2005 OS. Place hold
	5.	Mechanical design of microresonators : modeling and applications / Nicolae O. Lobontiu. by Lobontiu, Nicolae O Series: McGraw-Hill nanoscience and technology series Material type: Text; Format: print Publication details: New York : McGraw-Hill, c2006 Availability: Items available for loan: UMK Kampus Jeli (1)Call number: TK7875 .L62 2006 OS. Place hold
	6.	MEMS/MOEMS packaging : concepts, designs, materials, and processes / Ken Gilleo. by Gilleo, Ken Series: McGraw-Hill nanoscience and technology series Material type: Text; Format: print Publication details: New York : McGraw-Hill, c2005 Availability: Items available for reference: UMK Kampus Kota: Not for loan (1)Call number: TK7870.15 .G55 2005 REF.
	7.	LIGA and its applications / edited by Volker Saile ... [et al.]. by Saile, Volker Series: Advanced micro & nanosystems ; v. 7 Material type: Text; Format: print Publication details: Weinheim, Germany : Wiley-VCH, c2009 Availability: Items available for loan: UMK Kampus Jeli (2)Call number: TK7875 .L44 2009 OS, ... Place hold
	8.	Biomaterials for MEMS / editors M. Chiao & J.C. Chiao. by Chiao, Jung-Chih Qiao, Mu Material type: Text; Format: print Publication details: Singapore : Pan Stanford, c2011 Availability: Items available for loan: UMK Kampus Jeli (2)Call number: TK7875 .B56 2011 OS, ... Place hold
	9.	Cost-driven design of smart microsystems / Michael Niedermayer. by Niedermayer, Michael, 1971- Series: Artech House integrated microsystems series Material type: Text; Format: print Publication details: Boston : Artech House, c2012 Availability: Items available for loan: UMK Kampus Jeli (1)Call number: TK7875 .N54 2012. Place hold
	10.	Microelectromechanical systems / edited by Eve Versuh. by Versuh, Eve Material type: Text; Format: print ; Literary form: Not fiction Publication details: New York : Ny Research Press, 2015 Availability: Items available for loan: UMK Kampus Jeli (1)Call number: TK787 .M53 2015. Place hold

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