Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nano-materials and MEMS / edited by Kiyotaka Wasa, Isaku Kanno, Hidetoshi Kotera.
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TextPublication details: Waltham, MA : William Andrew, 2012.Edition: 2nd edDescription: xii, 644 p. : ill. ; 24 cmISBN: - 9781437734836
| Item type | Current library | Home library | Collection | Shelving location | Call number | Copy number | Status | Date due | Barcode | |
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UMK Kampus Jeli | UMK Kampus Jeli | DEFAULT | Kampus Jeli Open Shelf Level 1 | TS695 .W37 2012 (Browse shelf(Opens below)) | Available | 10333466 | |||
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UMK Kampus Jeli | UMK Kampus Jeli | FSB | Kampus Jeli Open Shelf Level 1 | TS695 .W37 2012 (Browse shelf(Opens below)) | 1 | Available | 10076108 |
Includes bibliographical references and index
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