Atomic layer deposition : principles, characteristics, and nanotechnology applications / Tommi Kääriäinen ... [et al.]
Material type:
TextPublication details: Hoboken, New Jersey : John Wiley & Sons, [2013]Description: xv, 253 p. : ill. ; 24 cmISBN: - 9781118062777
| Item type | Current library | Home library | Collection | Shelving location | Call number | Copy number | Status | Date due | Barcode | |
|---|---|---|---|---|---|---|---|---|---|---|
Open Shelf
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UMK Kampus Jeli | UMK Kampus Jeli | FSB | Kampus Jeli Open Shelf Level 1 | TS695 .K33 2013 (Browse shelf(Opens below)) | 1 | Available | 10074518 |
Includes bibliographical references and index.
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