Encyclopaedia of manufacturing techniques for microfabrication and nanotechnology - Jiang, Guomin; Auris Reference Editorial Board (United Kingdom : Auris Reference, 2015., 2015)
v. 1. Fundamentals techniques in microfabrication and nanotechnology -- v. 2. Microfabrication for industrial applications -- v. 3. Emerging technologies in micro-nanotechnology -- v. 4. Micro and nanotechnology for space systems.
Includes bibliographical references and indexes
Keywords: Manufacturing processes -- Encyclopedias; Microfabrication; Nanotechnology -- Encyclopedias; Space vehicles -- Technological innovations -- Encyclopedias