Niedermayer, Michael, 1971- Cost-driven design of smart microsystems / Michael Niedermayer. - Boston : Artech House, c2012. - xii, 229 p. : ill. ; 24 cm. - Artech House integrated microsystems series . Includes bibliographical references and index. ISBN: 9781608070848 Subjects--Topical Terms: Microelectromechanical systems.