LIGA and its applications / 
edited by Volker Saile ... [et al.]. 
 - Weinheim, Germany :  Wiley-VCH,  c2009. 
 - x, 479 p. :  ill. (some col.) ;  25 cm. 
 - Advanced micro & nanosystems ;  v. 7 .
<br/><br/> Fakulti Agro-Industri & Sumber Asli. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>9783527316984 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.<br/>Microtechnology.