TY  - BOOK
AU  - Doering,Robert
AU  - Nishi,Yoshio
TI  - Handbook of semiconductor manufacturing technology
SN  - 9781574446753
PY  - 2008///
CY  - Boca Raton
PB  - CRC Press
KW  - Semiconductor industry
KW  - Handbooks, manuals, etc
KW  - Semiconductors
KW  - Design and construction
N1  - Includes bibliographical references and index
ER  -