TY  - BOOK
AU  - Geng,Hwaiyu
TI  - Semiconductor manufacturing handbook
T2  - McGraw-Hill handbooks
SN  - 0071445595
PY  - 2005///
CY  - New York
PB  - McGraw-Hill
KW  - Integrated circuits
KW  - Design and construction
KW  - Handbooks, manuals, etc
KW  - Semiconductors
N1  - Includes bibliographical references and index
ER  -