Semiconductor manufacturing handbook / 
Hwaiyu Geng, editor in chief. 
 - New York :  McGraw-Hill,  c2005. 
 - 1 v. (various pagings) :  ill. ;  25 cm. 
 - McGraw-Hill handbooks .
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>0071445595 9780071445597 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits--Design and construction--Handbooks, manuals, etc.<br/>Semiconductors--Design and construction--Handbooks, manuals, etc.