TY  - BOOK
AU  - Van Zant,Peter
TI  - Microchip fabrication: a practical guide to semiconductor processing 
SN  - 0071432418
PY  - 2004///
CY  - New York
PB  - McGraw-Hill
KW  - Integrated circuits
KW  - Design and construction
KW  - Semiconductors
N1  - Includes bibliographical references and index
ER  -