Van Zant, Peter. <br/><br/>
Microchip fabrication :  a practical guide to semiconductor processing / 
Peter Van Zant. 
 - 5th ed. 
 - New York :  McGraw-Hill,  c2004. 
 - xiii, 642 p. :  ill. ;  24 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>0071432418 9780071432412 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits--Design and construction.<br/>Semiconductors--Design and construction.