Gilleo, Ken. <br/><br/>
MEMS/MOEMS packaging :  concepts, designs, materials, and processes / 
Ken Gilleo. 
 - New York :  McGraw-Hill,  c2005. 
 - xiii, 220 p. :  ill. ;  24 cm. 
 - McGraw-Hill nanoscience and technology series .
<br/><br/>Includes bibliographical references (p. 203-213) and index. 
<br/><br/><label>ISBN: </label>0071455566 9780071455565 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.<br/>Microelectronic packaging.<br/>Optoelectronic devices.