TY  - BOOK
AU  - Rodríguez,P.Pérez
TI  - Materials science in semiconductor processing
SN  - 9781773612393 
PY  - 2018///
CY  - Oakville, Canada
PB  - Arcler Press
KW  - Integrated circuits
KW  - Materials
KW  - Semiconductors
N1  - Includes bibliographical references and index
ER  -