Rodríguez, P. Pérez. <br/><br/>
Materials science in semiconductor processing / 
P. Pérez Rodríguez. 
 - Oakville, Canada :  Arcler Press,  2018. 
 - xxvii, 218 p. :  ill. col. ;  24 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9781773612393  
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits--Materials.<br/>Semiconductors.