TY  - BOOK
AU  - Aitmukan,Talant
AU  - Tynyshtykbaev,Kurbangali B.
TI  - Materials science in semiconductor processing
SN  - 9781788021470 
PY  - 2017///
CY  - United Kingdom
PB  - Auris Reference Limited
KW  - Integrated circuits
KW  - Materials
KW  - Semiconductors
N1  - Includes bibliographical references and index
ER  -