Materials science in semiconductor processing / 
Kurbangali B. Tynyshtykbaev, Talant Aitmukan, et al. 
 - United Kingdom :  Auris Reference Limited,  2017. 
 - ix, 190 p. :  ill. (some col.) ;  31 cm. 
<br/><br/>Includes bibliographical references and index  
<br/><br/><label>ISBN: </label>9781788021470  
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits--Materials.<br/>Semiconductors.