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Extreme ultraviolet lithography / [edited by] Banqiu Wu, Ajay Kumar.

Contributor(s): Material type: TextTextPublication details: New York : McGraw-Hill, 2009.Description: xiv, 465 p. : ill. ; 24 cmISBN:
  • 0071549188 (alk. paper)
  • 9780071549189 (alk. paper)
Subject(s):
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Holdings
Item type Current library Home library Collection Shelving location Call number Copy number Status Date due Barcode
Open Shelf Open Shelf UMK Kampus Bachok UMK Kampus Bachok FTKW Kampus Bachok Open Shelf Level 1 TK7872.M3 E987 2009 OS (Browse shelf(Opens below)) 2 Available 10029226
Open Shelf Open Shelf UMK Kampus Kota UMK Kampus Kota DEFAULT Kampus Kota Open Shelf TK7872.M3 E987 2009 OS (Browse shelf(Opens below)) Available 10016322

Includes bibliographical references and index.

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