Microchip fabrication : a practical guide to semiconductor processing /
Van Zant, Peter.
Microchip fabrication : a practical guide to semiconductor processing / Peter Van Zant. - 5th ed. - New York : McGraw-Hill, c2004. - xiii, 642 p. : ill. ; 24 cm.
Includes bibliographical references and index.
0071432418 9780071432412
Integrated circuits--Design and construction.
Semiconductors--Design and construction.
Microchip fabrication : a practical guide to semiconductor processing / Peter Van Zant. - 5th ed. - New York : McGraw-Hill, c2004. - xiii, 642 p. : ill. ; 24 cm.
Includes bibliographical references and index.
0071432418 9780071432412
Integrated circuits--Design and construction.
Semiconductors--Design and construction.