Materials science in semiconductor processing /

Materials science in semiconductor processing / Kurbangali B. Tynyshtykbaev, Talant Aitmukan, et al. - United Kingdom : Auris Reference Limited, 2017. - ix, 190 p. : ill. (some col.) ; 31 cm.

Includes bibliographical references and index

9781788021470


Integrated circuits--Materials.
Semiconductors.

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